سال انتشار: ۱۳۸۸

محل انتشار: سومین کنفرانس نانوساختارها

تعداد صفحات: ۳

نویسنده(ها):

M.H Mehran – Thin Film and Nanoelectronic lab, School of Electrical and Computer Eng, University of Tehran, Iran
Z Sanaee –
S Mohajerzadeh –

چکیده:

We report the evolution of nano-grass and nano-wires on silicon substrates using a novel high precision hydrogenation-assisted reactive ion etching (RIE). The formation of Si nano-grass and nano-wires in desired locations and features is possible using photolithography combined with a sequential chromium deposition and RIE removal of the silicon surface. The wetting angle of the processed silicon has been measured and compared with a bare silicon surface. It has been observed that the inclusion of the nano-grass at the surface of silicon converts it into a hydrophilic material which could be used for liquid-based acceleration and inclination sensors. Also the treated surface has been examined with oil contamination further evidencing its wetting ability.